Refurbished Equipment
Novellus' Refurbished Systems business unit provides a comprehensive suite of refurbished process equipment that is sold and serviced through the existing Novellus channel. The market focus of Refurbished Systems is 200 mm aluminum fabs manufacturing devices at 150 nanometers and above. To meet these needs, Novellus offers the following products:
| Process |
Applications |
Products |
PECVD
HDP
CVD-W
CMP
Surface Prep |
IMD, Passivation, TEOS
STI, PSG, IMD
Contact, Via
Tungsten Polish
Strip, Clean |
Concept One® 200, SEQUEL®, SEQUEL Express,
SPEED®
Concept One W, ALTUS®
776, MV 200
PEP IRIDIA®, L3510, G2100 |
Purchasing a refurbished system from Novellus Systems provides a number of benefits, including the following:
- Assurance that the equipment is a certified Novellus product
- Committed performance specifications
- Safety compliance
- Systems knowledge and expertise
- Service expertise and response
- Comprehensive spare parts knowledge and support
- Non-transferable software licensing