Customer Assistance

Field Service

To arrange for a Field Service Engineer to solve a current problem or to audit your Novellus tools for our latest support program enhancements, contact your local Field Service Office. Click Field Service for the office near you.

Engineering and Technical Support

The Global Response Center is staffed by knowledgeable and experienced Product Support Engineers who are available 24/7 to provide technical support via telephone. To contact an expert on your tool set, go directly to Engineering & Technical Support.

Spare Parts Support

Concerned about the cost of spares? With our Customer Specific Spare Parts program, you can
be confident that your parts management module contains only the components necessary to run your fab efficiently.
By leveraging your 24/7 access to our global spares inventory, you’ll get the most up-to-date

status of spares availability. Contact information is available on the Spare Parts Support web page.
 
Support, Publications, and Training

Novellus provides documentation including Safety Alerts, Technical Bulletins, Field Change Orders and Procedure Change Orders. Are you interested in attending one of our comprehensive training classes? To view technical documentation or upcoming class schedules, visit the InfoSource website.