About InfoSource

InfoSource is a web-based library that provides Novellus customers with the latest technical information for Novellus products. Content includes product manuals, safety alerts, product support documents, software support documents, course descriptions, class schedules, newsletters, and product notes.

Customer Specific Support Programs

Novellus helps customers maximize their return on investment with our family of Spares, Service and Enhancement modules.

By consulting with our customers, we can design a support program that optimizes the Productivity, Reliability and Efficiency of your Novellus tools.

For more information click on Support Programs.

Customer Assistance

Whether it's a situation that requires a site visit, or a question that can be answered by phone, technical help for Novellus tools is only a call away.

Our Logistics group is staffed 24x7 to ship the parts you order and provide the status of spares availability.

Click on Customer Assistance for more information.